Keyence IM-7001 Dimension Measurement System

Measurable area: 7.87" x 7.87"
Field of view: 3.94" x 3.94"
Minimum display unit 0.1 μm
Measurement accuracy (±2 sigma) for linked measurements: ±(4 + 0.02 L) μm*5
Repeatability w/o stage movement: ±0.5 μm High-precision / ±1 μm Wide-field
Repeatability with stage movement: ±1.5 μm High-precision / ±2 μm Wide-field
Light probe Measurable area (XY): 90 x 90 mm 3.54" . 3.54"
Light probe Maximum measurement depth: 30 mm 1.18"
Light probe diameter: 3 mm
Light probe Measuring force: 0.015 N
Light probe Repeatability: ±2 μm*7
Light probe Measurement accuracy: ±(8 + 0.02 L) μm*6
Back light Illumination: Telecentric transmissive illumination
Top light Illumination: Four division multi-angle illumination (motorized Z-movement)
Slit Ring Illumination: Directional motorized side-illumination
XY stage moving range: 3.94" x 3.94" (motorized)
Z-axis moving range: 2.95" (motorized)
Stage max load: 5 kg